发明名称 |
MEMBRANE OF RESTRICTED PERMEABILITY AND ITS MANUFACTURING METHOD, CHEMICAL SENSOR ELEMENT, AND METHOD OF MANUFACTURING CHEMICAL SENSOR ELEMENT |
摘要 |
PROBLEM TO BE SOLVED: To provide a membrane of restricted permeability capable of controlling easily permeability of a nonchemical substance, a manufacturing method therefor, a chemical sensor element, and a method of manufacturing the chemical sensor. SOLUTION: An uneven part 101 is formed in a face faced to a functional membrane 2 in the membrane 1 of restricted permeability, in the chemical sensor element having at least a transducer 4 and the membrane 1. |
申请公布号 |
JP2001215207(A) |
申请公布日期 |
2001.08.10 |
申请号 |
JP20000024467 |
申请日期 |
2000.02.01 |
申请人 |
NEC CORP;TAMA ELECTRIC CO LTD |
发明人 |
SAITO SOICHI;IKEDA SATORU |
分类号 |
G01N27/327 |
主分类号 |
G01N27/327 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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