| 摘要 |
PROBLEM TO BE SOLVED: To stably measure both a pressure from a middle level vacuum region to a high level vacuum region by an ionization type first measuring element and a pressure of a measurement region proper to a second measuring element. SOLUTION: This ionization gage has a measuring element container 2 and a first and a second measuring parts set in the container. The first measuring part is formed in an ionization type structure with a consolidated electrode including a filament 3, a grid 4 and an ion collector 8 for measuring the pressure in a vacuum state. The second measuring part is formed in a structure with a function different from that of the first measuring part. The second measuring part is set to a space in the vicinity on an extension line of an axis of the grid and outside a main fly space of thermoelectrons emitted from the filament. A shield plate 13 is set between the second measuring part and the consolidated etectrode for spatially separating the second measuring part and the consolidated electrode. The second measuring part is fixed to an element-fixing plate 17 formed of a material having superior thermal conduction properties.
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