发明名称 LASER PLASMA X-RAY SOURCE
摘要 PROBLEM TO BE SOLVED: To prevent damage on an optical mirror due to debris generated by a laser plasma X-ray source. SOLUTION: An optical mirror 20 is arranged in the direction opposite to the scattering direction of ion debris on the plane made by the direction of an impressed magnetic flux 9 toward the side of incident laser beam and the direction of liquid injection 8 thus avoiding possible damage by the debris on the optical mirror.
申请公布号 JP2001217096(A) 申请公布日期 2001.08.10
申请号 JP20000027301 申请日期 2000.01.31
申请人 HITACHI LTD 发明人 MATSUI TETSUYA;KONAKAWA NOBUYOSHI
分类号 H05G2/00;(IPC1-7):H05G2/00 主分类号 H05G2/00
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