发明名称 |
LASER PLASMA X-RAY SOURCE |
摘要 |
PROBLEM TO BE SOLVED: To prevent damage on an optical mirror due to debris generated by a laser plasma X-ray source. SOLUTION: An optical mirror 20 is arranged in the direction opposite to the scattering direction of ion debris on the plane made by the direction of an impressed magnetic flux 9 toward the side of incident laser beam and the direction of liquid injection 8 thus avoiding possible damage by the debris on the optical mirror. |
申请公布号 |
JP2001217096(A) |
申请公布日期 |
2001.08.10 |
申请号 |
JP20000027301 |
申请日期 |
2000.01.31 |
申请人 |
HITACHI LTD |
发明人 |
MATSUI TETSUYA;KONAKAWA NOBUYOSHI |
分类号 |
H05G2/00;(IPC1-7):H05G2/00 |
主分类号 |
H05G2/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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