发明名称 METHOD AND APPARATUS FOR SUCTION AND ALIGNMENT OF VERY SMALL METAL SPHERE
摘要 PROBLEM TO BE SOLVED: To provide a suction and alignment method for very be metal spheres in which the very small metal spheres can be sucked and aligned quickly and by reducing a suction defect while the very small metal spheres are not discolored to be black. SOLUTION: In the suction and alignment method for the very small metal spheres, the very small metal spheres are vacuum-sucked to a suction hole in a suction jig in such a way that the suction jig which is provided with a plurality of suction holes used to vacuum-suck and align the very small metal spheres in a plurality and a housing container which houses many very small metal spheres are turned within the vertical face while both and alignment method for the very small metal In the suction and alignment method for the very small metal spheres, the very small metal spheres are vacuum-sucked while an ultrasonic vibration is given to the suction jig when the suction jig and the housing container are turned within the vertical face.
申请公布号 JP2001217272(A) 申请公布日期 2001.08.10
申请号 JP20000023554 申请日期 2000.02.01
申请人 UENO SEIKI KK 发明人 SHIGEMURA TOSHIO
分类号 H01L21/60;(IPC1-7):H01L21/60 主分类号 H01L21/60
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