| 摘要 |
<p>PROBLEM TO BE SOLVED: To fully restrain vibration generated in an exposure system body, even if a stage is moved in either the forward direction or the backward direction. SOLUTION: In a stage device, having a movable stage whereon a reticle and a substrate are mounted and a drive device for driving the movable stage, a fixing piece of a drive device or an actuator which energizes the support part is provided and an energization amount by an actuator is controlled to cancel reaction generated, when a movable stage is moved by a control device. In the process, the direction of movement of a stage is determined by a determination part 66d and a command value to an actuator by an operation part 66a is switched by a switch part 66c, by adjusting it by its proper gains K1 to K6 when it is moved in a forward direction, and adjusting it by its proper gains K1' to K6', when it is moved in the reverse direction.</p> |
