| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a liquid crystal display panel, formed by using a polycrystalline ITO film as a protective film from a hydrofluoric acid based etchant. SOLUTION: The liquid crystal display panel is constituted of a substrate 101, a gate electrode 104 formed thereon and composed of metal, an insulating film 107 formed on the gate electrode, a polycrystalline indium tin oxide film 117, having a crystal structure of a cubic bixbyte type and formed on the insulating film and a source and drain electrode 110 formed on the polycrystalline indium tin oxide film.</p> |
