| 摘要 |
PROBLEM TO BE SOLVED: To measure pressures of a wide range in comparison with the prior art without greatly changing a structure of the conventional capacitive type vacuum sensor, in a capacitive type vacuum sensor having inside a pair of a diaphragm electrode and a fixed electrode opposite to each other via a space for measuring the gas pressure from a change of a capacitance between the diaphragm electrode and the fixed electrode, because of a shift of the diaphragm electrode corresponding to the gas pressure. SOLUTION: The space between the diaphragm electrode (4) and the fixed electrode (5) is sealed with a higher pressure than a measurement lower limit pressure. An amount of the shift of the diaphragm electrode (4) in a direction away from the fixed electrode 5 can be controlled by impressing a DC voltage to the fixed electrode (5).
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