| 摘要 |
PROBLEM TO BE SOLVED: To provide a liquid crystal injection device that can energize its door evenly toward its chamber opening and can prevent seal damage when the door is opened and closed. SOLUTION: A chamber 1 and a door 2 are provided with fixing devices 10a to 11, and the driving force of motors 13 in the fixing devices 10a to 11 is used to energize and fix the door 2 toward and at a chamber opening 1a. The door 2 can be energized evenly toward the chamber opening 1a to step a gas leak during pressurization, and in addition, can be energized with a continuously proper energizing force toward the chamber opening 1a so as to be easily opened and closed. In its sliding motion, the door 2 is moved via a moving mechanism to a retracted position where it has a clearance to the chamber opening 1a, so that the door 2 and a seal 111 around the chamber opening 1a are protected against interference with each other.
|
