PLASMA CONVERGING LIGHT SOURCE HAVING IMPROVED PULSE POWER SOURCE SYSTEM

摘要

PROBLEM TO BE SOLVED: To provide a plasma converging light source having an improved pulse power source system. SOLUTION: A pair of plasma pinch electrodes 8 are arranged within a vacuum chamber. This chamber houses a rear gas buffer groups and a working gas containing the active gas selected to impart desirable spectral rays. The pulse power source 10 provides electric pulses at voltage sufficiently higher than the voltage for forming a discharge between the electrodes in order to impart the radiation at the spectral ray of the active gas described above by forming the plasma pinch of an extremely high temperature and high density. More preferably, the electrodes are constituted coaxially with an axial anode. In a more preferable embodiment, the optimization of a capacitance value and the length and shape of the anode is provided and a more preferable active gas supply system is disclosed. The more preferable embodiment includes the pulse power source having a magnetic compression circuit provided with a charging capacitor and a pulse converter. A heat pipe cooling system for cooling the central anode is described.