EVACUATION DEVICE AND METHOD

摘要

PROBLEM TO BE SOLVED: To prevent damage of Pirani gauge by corrosive gas of a reaction chamber while having the protective function of a turbo pump in an evacuation device. SOLUTION: This evacuation device comprises a gas stop valve 2 for introducing gas into the reaction chamber 1, the Pirani gauge 6 for arranging a Pirani isolation valve 19 between the gauge and the reaction chamber 1, a manometer gauge 10 provided with a manometer isolation valve 9 and the turbo pump 4 provided with a main valve 7. When introducing the introducing gas into the reaction chamber 1, the Pirani isolation valve 19 is closed to prevent the Pirani gauge 6 from being exposed to the introducing gas. Pressure is detected by the manometer gauge 10. When judging that there is the necessity of being detected by the Pirani gauge 6, the Pirani isolation valve 19 is opened. Pressure is measured by the Pirani gauge 6 to judge the necessity of protecting the thrbo pump 4.