R-Fe-B VERTICAL MAGNETIC ANISOTROPY THIN-FILM MAGNET AND MANUFACTURING METHOD THEREOF

摘要

PROBLEM TO BE SOLVED: To provide an R-Fe-B vertical magnetic anisotropy thin-film magnet, which can be sharply improve both of its coercive force and its residual magnetic flux density by a film-forming method using a sputtering method, and to provide a manufacturing method of the magnet. SOLUTION: A substrate is subjected to sputtering at normal temperatures, without heating the substrate on a composite board consisting of a heat-resistant metallic material of thermal conductivity higher than 50 W.m-1.K-1 at normal temperatures and a low-heat conduction material of a thermal conductivity lower than 1.1 W.m-1.K-1 at normal temperatures and after an R-Fe-B alloy thin film is formed, heat treatment is conducted on the alloy thin film or after a protective film is formed on the formed alloy thin film, heat treatment is conducted on the protective film.