| 摘要 |
PROBLEM TO BE SOLVED: To provide a wire bonder in which the frequency of maintenance work can be decreased by disusing the rotary bearing of an oscillation shaft bearing a horn member. SOLUTION: In the wire bonder for bonding a wire by pressing it against a bonding point by means of a capillary tool 13, a shaft supporting part for supporting a base part 20 coupled with a horn 12 for holding the capillary tool 13 from the opposite sides such that it can oscillate freely about the oscillation shaft in the horizontal direction comprises four leaf spring members 25 having a cut at an intermediate part disposed radially about the oscillation shaft. Since a resilient shaft structure having a low torsional rigidity and a high bending rigidity is realized, the oscillatory drive load can be reduced while suppressing flexure of the oscillation shaft and the horn 12 can be supported to oscillate feely without using a rotary bearing. |
