发明名称 PHOTOSENSITIVE RESIN COMPOSITION AND METHOD OF PRODUCING THE SAME
摘要 PROBLEM TO BE SOLVED: To provide a polyimide precursor developable with an aqueous alkali solution and having negative type pattern forming ability, and a method of stably producing the polyimide precursor. SOLUTION: The photosensitive resin composition comprises (A) the polyimide precursor having organic groups R3 and R4 each having a styrylpyridinium salt skeleton or a styryldiazinium skeleton as shown by formulae, (B) a dehydration condensing agent used in the synthesis of the polyimide precursor, e.g. diphenyl(2,3-dihydro-2-thioxo-3-bezoxazole)phosphonate, (C) a photopolymerization initiator, a sensitizer or an inhibitor for imparting shelf stability and (D) a solvent containing a photosensitive agent.
申请公布号 JP2001215699(A) 申请公布日期 2001.08.10
申请号 JP20000025131 申请日期 2000.02.02
申请人 TOSHIBA CHEM CORP 发明人 NAGAYA HIDENORI
分类号 G03F7/027;C08F2/50;C08F290/14;C08G73/12;C08K5/00;C08L79/08;G03F7/004;G03F7/028;H01L21/027 主分类号 G03F7/027
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