摘要 |
<p>PROBLEM TO BE SOLVED: To suppress the leak current due to deposition of conductive deposits on scribe lines during laser scribing of a backside electrode film of an integrated thin film solar cell. SOLUTION: The integrated thin film solar cell comprising a light-permeable insulation substrate 1, transparent conductive film 2, amorphous silicon semiconductor photoelectric conversion layer 3 and backside electrode film 4 is divided in a plurality of serially connected power generating regions on the insulation substrate 1, a resist film 6 is laminated on the backside electrode film 4, backside electrode separating lines 30 are patterned in approximately the same shape, together with the resist film 6, the backside electrode film 4 and the photoelectric conversion layer 3, and the backside electrode film 4 existing between the resist film 6 and the photoelectric conversion layer 3 is cut inside.</p> |