| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for observing an image capable of improving the image quality in the process of finding a target area or the like and realize a digital scanning electron microscope. SOLUTION: In finding the target area, a stage controller 8 is controlled by a pointer 20 through a stage control unit 23. During this control, a stage 10 is moved in both X and Y directions, while a sample 4 is transferred. In these procedures, with the pointer 20, the area to be displayed as an image in a cathode ray tube 18, is fixed. Along with the fixing of the area displayed, a scanning area for an electron beam EB is narrowed. Through a multiplication control unit 23, an image multiplication unit 16 is controlled in order to increase cycles of the image multiplication, resulting in achievement of the better image quality.
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