IMPROVED OPTICAL METHOD FOR MEASURING THIN METAL FILMS

摘要

A method and system for measuring properties of a sample are disclosed. At least one source of excitation radiation is used to irradiate the sample's surface. This excites multiple acoustic modes within the sample. A probe source of radiation diffracts off the acoustic modes to generate a signal beam. The signal beam is detected and analyzed to yield a signal waveform, from which a Fourier Transform spectrum is derived. The Fourier Transform spectrum features frequencies corresponding to the multiple acoustic modes. Analysis of the spectrum yields measurements of the sample's properties.