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发明名称
Verfahren und Vorrichtung zur Messung der Schichtdicke
摘要
申请公布号
DE19933316(C2)
申请公布日期
2001.08.09
申请号
DE19991033316
申请日期
1999.07.16
申请人
FRAUNHOFER-GESELLSCHAFT ZUR FOERDERUNG DER ANGEWANDTEN FORSCHUNG E.V.
发明人
WALLER, REINHOLD;SCHNUPP, RALF
分类号
G01B11/06;H01L21/66;(IPC1-7):G01B11/06;G01J1/16
主分类号
G01B11/06
代理机构
代理人
主权项
地址
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