METHOD AND DEVICE FOR SIMULTANEOUSLY MEASURING MULTIPLE PROPERTIES OF MULTILAYER FILMS

摘要

The invention relates to a method and device for simultaneously measuring multiple properties of a sample composed of multiple layers of films. The measurement features several steps. First, at least one source of excitation radiation irradiates the sample's surface to excite an acoustic mode. A probe source of radiation irradiates the acoustic mode and is diffracted off the surface of the sample to form a signal beam. A detector detects the acoustic mode to generate a signal beam, which is then analyzed to determine an acoustic frequency and an amplitude, a depth of modulation, or a decay constant. These properties are then further analyzed to determine of at least two properties (e.g., a thickness of two layers) of the sample.