METAL BUCKLING BEAM PROBE

摘要

A buckling beam probe assembly and a process to make the assembly using insulated metal to hold the vertical beam probe wires. The buckling beam probe assembly electrically connects a test apparatus with contact pads on the surface of a device to be tested. The assembly comprises a plurality of buckling beam wires each having a head, a body, and a tail and being pressed vertically onto the contact pads and buckling laterally to adapt to height differences of the contact pads caused by irregularities on the surface of the device to be tested. A top plate has a first plurality of apertures receiving the heads of the plurality of buckling beam wires. A bottom plate has a second plurality of apertures receiving the tails of the plurality of buckling beam wires. A plurality of intermediate metal sections are positioned between the top plate and the bottom plate. Each of the intermediate metal sections have a plurality of openings, the openings being coated with an insulation layer and receiving the bodies of the plurality of buckling beam wires.