发明名称 METHOD AND APPARATUS FOR MEASUREMENT OF WEIGHT DURING CVI/CVD PROCESS
摘要 This invention is in the field of Chemical vapor infiltration and Chemical vapor deposition (CVI/CVD). More specifically, this invention is directed to method and apparatus for weighing parts being subjected to the CVI/CVD process, during the process itself to indicate a weight change thereof. The process may be terminated or altered as desired based upon the weight gain information.
申请公布号 US2001011609(A1) 申请公布日期 2001.08.09
申请号 US19980178399 申请日期 1998.10.23
申请人 RUDOLPH JAMES W. 发明人 RUDOLPH JAMES W.
分类号 C23C16/04;C23C16/52;(IPC1-7):G01G19/00 主分类号 C23C16/04
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