发明名称 Mos transistor having self-aligned well bias area and method of fabricating the same
摘要 A MOS transistor having a self-aligned well bias area and a method of fabricating the same provide for efficient application of well bias in a highly integrated semiconductor substrate without causing latch-up. The well bias area is formed at a trench, which is formed by etching a semiconductor substrate in a manner of self-alignment, so that well bias can be efficiently applied to the MOS transistor achieving reduction of the area of a chip without degradation of electrical characteristics.
申请公布号 US2001012673(A1) 申请公布日期 2001.08.09
申请号 US20010774859 申请日期 2001.01.31
申请人 SAMSUNG ELECTRONICS CO., LTD. 发明人 GYU-CHUL KIM
分类号 H01L23/522;H01L21/336;H01L21/60;H01L21/74;H01L21/768;H01L21/8234;H01L21/8244;H01L27/088;H01L27/11;H01L29/78;(IPC1-7):H01L21/331 主分类号 H01L23/522
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