发明名称 METHODS AND APPARATUS FOR PROCESSING INSULATING SUBSTRATES
摘要 <p>A disk gripper (70) for gripping an insulating disk (124) at its edge during processing includes a contact device for contacting the edge of the disk and a mechanism for moving the contact device between a contact position and a retracted position. The apparatus includes pivot pins (128 and 126), a gripper body (110), a pedestal (112), side wings (122 and 120), gripper fingers (132, 130, and 140), contact pins (160 and 162), contact rods (170 and 172), springs (180 and 182), and retraction pins (190 and 192).</p>
申请公布号 WO2001056708(A1) 申请公布日期 2001.08.09
申请号 US2001002441 申请日期 2001.01.23
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