DEVICE AND METHOD FOR WASHING SUBSTRATE END FACE

摘要

A substrate end face washing device capable of holding the peripheral end faces of a substrate (1) between an elastic porous body (29) of an upper surface washing roller (16) and an elastic porous body (30) of a lower surface washing roller (17), wherein, when a drive motor is driven, the lower surface washing roller (17) is rotated through a driven pulley (24) and the upper surface washing roller (16) is rotated in the direction opposite to the lower surface washing roller (17) through a driven pulley (23), washing fluid is fed to the insides of supporting members (27) and (28) from a washing fluid delivery nozzle through a washing fluid feed pipe to allow the washing fluid to be penetrated into the elastic porous bodies (29) and (30) through communication holes (35) formed in the outer peripheral walls of the supporting members (27) and (28), and then, while the upper surface washing roller (16) and the lower surface washing roller (17) are rotated, the upper surface washing roller (16) and the lower surface washing roller (17) are moved relative to each other along the peripheral end faces of the substrate (1).