发明名称 |
Apparatus for producing polycrystalline silicon sheets and production method using the same |
摘要 |
An apparatus (10) for producing a polycrystalline silicon sheet includes a crucible (1), a heating unit (5) for heating a starting material of silicon fed in the crucible (1), and a cooling unit (4) for contacting a melt of the starting material (S1) melted by heating to a cooling face (4a) of a cooling member, thereby obtaining a polycrystalline silicon sheet in which crystals of silicon are grown, wherein the cooling face (4a) of the cooling member has a sheet adhering portion for providing a silicon starting point of crystallization and allowing adhesion of the polycrystalline silicon sheet of grown crystals and a sheet stripping portion for allowing easy stripping of the polycrystalline silicon sheet. <IMAGE> |
申请公布号 |
EP1085559(A3) |
申请公布日期 |
2001.08.08 |
申请号 |
EP20000119919 |
申请日期 |
2000.09.13 |
申请人 |
SHARP KABUSHIKI KAISHA |
发明人 |
YOSHIDA, KOJI;YANO, KOZABURO;IGARASHI, KAZUTO;TSUKUDA, YOSHIHIRO;MITSUYASU, HIDEMI |
分类号 |
C01B33/02;C30B15/00;C30B28/10;C30B29/06;C30B29/64;C30B30/00;H01L31/04 |
主分类号 |
C01B33/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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