| 摘要 |
A laminar flow element for use in thermal mass flow sensors and flow controllers comprising a laminar flow element (25) having a generally pointed entry end (15) for maintaining a pure laminar flow path around the laminar flow element (25), a plurality of standoff pins (28) protruding from the outer surface of the laminar flow element (25), and a thermal mass flow sensor (12) is provided such that the laminar flow element (25) is substantially concentric with a borehole (29) of a flow block (16). |
