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发明名称
ELECTRIC SUPPLY UNIT FOR PLASMA INSTALLATIONS
摘要
申请公布号
EP1121705(A1)
申请公布日期
2001.08.08
申请号
EP20000965751
申请日期
2000.08.13
申请人
HUETTINGER ELEKTRONIK GMBH & CO. KG
发明人
ZAEHRINGER, GERHARD;WIEDEMUTH, PETER;RETTICH, THOMAS
分类号
H01J37/32;(IPC1-7):H01J37/32
主分类号
H01J37/32
代理机构
代理人
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地址
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