| 发明名称 |
Power delivery system |
| 摘要 |
<p>A method and apparatus for measuring the characteristics of radio frequency energy in an industrial radio frequency processing system at a plurality of frequencies is disclosed. The method and apparatus measures the characteristics of radio energy using one detector. <IMAGE></p> |
| 申请公布号 |
EP1122762(A2) |
申请公布日期 |
2001.08.08 |
| 申请号 |
EP20010300798 |
申请日期 |
2001.01.30 |
| 申请人 |
ENI TECHNOLOGIES, INC. |
发明人 |
KEANE, ANTHONY R. A.;VONA , DANIEL F., JR. |
| 分类号 |
H05H1/46;G01R23/00;H01J37/32;H01L21/302;H01L21/3065;(IPC1-7):H01J37/32 |
主分类号 |
H05H1/46 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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