发明名称 Method for making surfactant-templated, high-porosity thin films
摘要 An evaporation-induced self-assembly method to prepare a surfactant-templated thin film by mixing a silica sol, a surfactant, and a hydrophobic polymer and then evaporating a portion of the solvent during coating onto a substrate and then heating to form a liquid-phase, thin film material with a porosity greater than approximately 50 percent. The high porosity thin films can have dielectric constants less than 2 to be suitable for applications requiring low-dielectric constants. An interstitial compound can be added to the mixture, with the interstitial compound either covalently bonded to the pores or physically entrapped within the porous structure. The selection of the interstitial compound provides a means for developing thin films for applications including membranes, sensors, low dielectric constant films, photonic materials and optical hosts.
申请公布号 US6270846(B1) 申请公布日期 2001.08.07
申请号 US20000517689 申请日期 2000.03.02
申请人 SANDIA CORPORATION 发明人 BRINKER C. JEFFREY;LU YUNFENG;FAN HONGYOU
分类号 B01F17/00;C03C17/00;(IPC1-7):B05B5/00 主分类号 B01F17/00
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