| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a laser beam processing method in which both of an ablation and heat transmission effect are compatible with each other and a high- precision fine processing is also attainable, and its apparatus. SOLUTION: A YAG laser 10 for irradiating a laser beam to a processed object for pre-heating and a titanium sapphire laser (femto-second laser) 11 for processing a pre-heated processed object by an irradiation of the laser beam are provided. Namely, the processed object is first pre-heated by the YAG laser 10 and then processed by the titanium sapphire laser (femto-second laser) 11. Any residues are not existed around a processed bottom portion, and further, heat damage for a periphery of the processed portion is restrained so that a sharp processed profile is obtained.</p> |
