PROCESS OF PRODUCING HIGH PURITY SILICA GLASS UTILIZING SOL-GEL METHOD

摘要

PROBLEM TO BE SOLVED: To provide a process to produce high purity silica glass utilizing sol-gel method whereby rod shaped silica glass with improve formability can be produced while suppressing most of cracks in the occurs of drying even a fluorine compound is added. SOLUTION: This process comprises a preparation step 100 of preparing mixed aqueous solution by mixing a fluorine compound and a dispersion agent in the deionized water, a mixing step 200 of mixing fumed silica with the above mixed aqueous solution, a dispersion step 300 of agitating the above mixture to form a sol, an aging step 400 of aging the sol at the ambient temperature to stabilize silica particles, and a defoaming step 500 of removing bubbles contained in the sol and adding a gelation agent.