发明名称 Device for wet treatment of substrates
摘要 In a device for the wet treatment of substrates (3) in a container (1), containing a treatment fluid (2), whereby the substrates (3) are introduced into the container (1) with a substrate carrier (5), an optimal alignment and centering of the substrates (3) will result within the container (1) upon lifting from the container (1) with the aid of a substrate receiving device (4) provided within the container (1).
申请公布号 US6269822(B1) 申请公布日期 2001.08.07
申请号 US19990171271 申请日期 1999.03.22
申请人 STEAG MICROTECH GMBH 发明人 FUNKHANEL JURGEN;MEISTER DIETER;WEBER MARTIN;WEHRLE FELIX
分类号 B08B3/04;B65G49/04;H01L21/00;H01L21/304;H01L21/677;(IPC1-7):B08B3/04 主分类号 B08B3/04
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