| 摘要 |
PROBLEM TO BE SOLVED: To provide a producer for ozonized water used to wash a semiconductor integrated circuit, or the like. SOLUTION: This producer is provided with an oxygen generator 6 for separating high purity gaseous oxygen from air by electrochemically transferring oxygen ions via an ion conductive solid electrolyte membrane, an oxygen tank 9 with a pressure sensor 11 for storing the separated gaseous oxygen, a gaseous ozone generator 17 for generating high purity gaseous ozone gas from the gaseous oxygen supplied from the oxygen tank 9 via a stop valve 13 and a flow meter 15 by high-frequency discharge, a gaseous ozone dissolving part 18 for dissolving the produced gaseous ozone into pure water fed via a stop valve 19, and an ozonized water storage part 20 having a water level gauge 21 and a densitometer 22 for storing the ozonized water. Based on detection signals of the pressure sensor 11, the flow meter 15, the water level gauge 21 and the densitometer 22, voltage applied to the solid electrolyte membrane and opening degrees of the stop valves 13, 19 are feedback-controlled with a control part 4.
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