发明名称 WASHING DEVICE FOR POLISHING MACHINE AND POLISHING MACHINE
摘要 PROBLEM TO BE SOLVED: To provide a washing device for a polishing machine capable of washing even an abrasive cloth in the vicinity of the outer circumferential face of a center roller. SOLUTION: The washing device is provided with a washing arm 22 movable between the position on a surface plate 12 and the position allocated outside the surface plate 12 inside a plane parallel to the abrasive cloth, a high-pressure jet nozzle 31 jetting washing high-pressure water toward the abrasive cloth, and a splash preventing means 40 surrounding the circumference of the high- pressure jet nozzle 31 for preventing the water jetted from the high-pressure jet nozzle from splashing around. The high-pressure jet nozzle 31 is arranged so that the nozzle lower end side is directed toward the center roller 12 in approach toward the center roller 12 according to the shift of the arm 22, so that high-pressure water jetted from the nozzle is jetted toward the abrasive cloth in the vicinity of the center roller 12 outer circumferential face.
申请公布号 JP2001212750(A) 申请公布日期 2001.08.07
申请号 JP20000349175 申请日期 2000.11.16
申请人 FUJIKOSHI MACH CORP 发明人 NISHIMOTO YOSHINOBU;NAKAJIMA MAKOTO;NAKAMURA YOSHIO;DENDA YASUHIDE;MIYAGAWA CHIHIRO
分类号 B24B53/007;B08B3/02;B24B53/017;B24B55/06;H01L21/304 主分类号 B24B53/007
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