| 摘要 |
PROBLEM TO BE SOLVED: To provide a process of preparing a ferroelectric thin film made by solution coating method which shows ferroelectric hysteresis curve by reducing leakage, or is improved in repeated fatigue characteristics. SOLUTION: In the process of preparing raw material solution for a ferroelectric thin film which comprises lead acetate, zirconium acetylacetonate and titanium tetraisopropoxide as raw materials, butoxyethanol as a solvent, and diethanolamine and polyethylene glycol as additives, the amount of diethanolamine in the raw material solution is four times or more of total mol numbers of zirconium and titanium in the raw material solution. |
