发明名称 Non-lithographic process for producing nanoscale features on a substrate
摘要 A non-lithographic process for producing nanoscale features on a substrate is presented. The process involves applying to and reacting a first difunctional molecule with the surface of a substrate. A second difunctional molecule is applied and reacted with unreacted functional groups from the first difunctional molecule to form a patterned layer on the surface of a substrate. Selective application of the difunctional molecules is accomplished by using a nanoscale delivery device.
申请公布号 US6270946(B1) 申请公布日期 2001.08.07
申请号 US20000502130 申请日期 2000.02.10
申请人 LUNA INNOVATIONS, INC. 发明人 MILLER MICHAEL B.
分类号 B82B3/00;G03F7/00;G03F7/16;(IPC1-7):G03C5/00 主分类号 B82B3/00
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