发明名称 |
Non-lithographic process for producing nanoscale features on a substrate |
摘要 |
A non-lithographic process for producing nanoscale features on a substrate is presented. The process involves applying to and reacting a first difunctional molecule with the surface of a substrate. A second difunctional molecule is applied and reacted with unreacted functional groups from the first difunctional molecule to form a patterned layer on the surface of a substrate. Selective application of the difunctional molecules is accomplished by using a nanoscale delivery device.
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申请公布号 |
US6270946(B1) |
申请公布日期 |
2001.08.07 |
申请号 |
US20000502130 |
申请日期 |
2000.02.10 |
申请人 |
LUNA INNOVATIONS, INC. |
发明人 |
MILLER MICHAEL B. |
分类号 |
B82B3/00;G03F7/00;G03F7/16;(IPC1-7):G03C5/00 |
主分类号 |
B82B3/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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