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发明名称
摘要
申请公布号	JP3196644(B2)	申请公布日期	2001.08.06
申请号	JP19960157840	申请日期	1996.06.19
申请人		发明人
分类号	H05B33/10;C23C14/28;G09F9/30;H01L21/203;H01L21/363;(IPC1-7):H01L21/203	主分类号	H05B33/10
代理机构		代理人
主权项
地址

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