ACTUATORS INCLUDING SERPENTINE ARRANGEMENTS OF ALTERNATING ACTUATING AND OPPOSING SEGMENTS AND RELATED METHODS

摘要

A micromechanical system can include a substrate, an actuator, and an actuat ed element. In particular, the actuator can include a serpentine arrangement of alternating actuating and opposing segments anchored at a first end thereof to the substrate wherein the actuating segments deflect in response to actuation thereof so that a second end of the serpentine arrangement moves relative to the substrate upon deflection of th e actuating segments. The actuated element is attached to the second end of the serpenti ne arrangement so that the actuated element moves relative to the substrate upo n deflection of the actuating segments. Related methods and actuators are also discussed.