| 摘要 |
PURPOSE: To provide a method of detecting a substrate and an apparatus thereof, by which a substrate in a sealed case can be detected detected with high reliability and at a high speed by using a rational and simple construction, without the need for a system for conveying the substrate. CONSTITUTION: In synchronization with an opening operation of a sealed case 1, the opening operation is carried out by a lid open/close mechanism 10 for detaching a lid 12 of the sealed case 1 having a plurality of processed substrates 2 therein, a substrate detecting sensor 28 is conveyed to a position where the substrates 2 can be detected in the sealed case 1, when the lid 12 is shifted by a predetermined distance in the opening direction. The substrate detecting sensor 28 successively detect the presence and a storing position of the substrate 2 in each storage section, when the lid open/close mechanism 10 conveys the lid 12 in the opening direction. When the detection operation for all the substrates 2 in the sealing case 1 are finished, the substrate detecting sensor 28 is sheltered to the outside of the sealed case 1.
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