METHOD FOR RECOGNIZING WAFER ID

摘要

PURPOSE: A method for recognizing a wafer ID is provided to recognize the ID of the wafer by a wafer recognizer before providing the wafer to a manufacturing apparatus in order to manage the recognition of ID for separate wafers. CONSTITUTION: The wafer ID recognizing method applies to a manufacturing control system includes a manufacturing apparatus(240), an apparatus server(220), a wafer recognizer(230) and a wafer history managing database. The manufacturing apparatus contains a wafer in a wafer cassette with an ID(identification) and performs the process. The apparatus server is coupled with the manufacturing apparatus. The wafer recognizer is coupled with the apparatus server. The wafer history managing database stores a comparison table including information of the wafer whose ID is recognized by the wafer recognizer. At first step, the information of the wafer is registered by using the ID. Then, the ID is read by using the wafer recognizer while the process is performed by the manufacturing apparatus. At third, the information of the wafer is recognized by using the ID and the data stored in the comparison table.