| 摘要 |
PURPOSE: A material handling system for a semiconductor process is provided to decide a material returning method of a semiconductor process product automatically based on a lot identifying code, information of all sorts of servers, and information of a carrier buffer system. CONSTITUTION: A host receives LOT IDs, process results thereof, and information of test results from each server for deciding a returning of LOT IDs stocked in a CBS(carrier buffer system), and receives information of state of each server and CBS information(S10). The host collects data of the LOT IDs based on the received information(S12). As the result, a returning method with respect to the LOT IDs is decided(S14). A CBS positions are decided for adjusting the number of processing products being mounted in a carrier and it is decided whether the products are returned to the CBS(S16). If a consideration of a change factor as an amount adjustment of the product is necessary, the carrier is not returned and waited(S18). After that, the carrier is returned through a returning method deciding process in accordance with a re-acquisition and a collection of data. |
