发明名称 METHOD OF TEMPERATURE MEASUREMENT, METHOD OF TEMPERATURE CONTROL, AND DEVICE FOR HEAT TREATMENT
摘要 PROBLEM TO BE SOLVED: To provide method of temperature measurement capable of measuring the temperature of a measuring body (body to be treated) with high accuracy in a multiple reflection environment. SOLUTION: In this method of measuring the temperature of the measuring body 54 (W) placed in the multiple reflection environment by using a radiation thermometer 40 utilizing emissivity, an effective emissivityεeff defineed by the following expression is used as the above emissivity:εeff=(1-α).ε+α.ε/[1.F.r.(1-ε)]. where F is a view factor,εis the emissivity of a measured value, r is the reflectivity of a reflector on the side of the radiation thermometer, andαis a weighting factor of multiple reflection. This enables the temperature of the measuring body (body to be treated) to be measured with high accuracy in the multiple reflection environment.
申请公布号 JP2001208610(A) 申请公布日期 2001.08.03
申请号 JP20000016341 申请日期 2000.01.25
申请人 TOKYO ELECTRON LTD 发明人 SHIGEOKA TAKASHI;SAKUMA TAKESHI
分类号 H01L21/302;G01J5/00;G01J5/02;H01L21/3065;H01L21/31;H01L21/66;(IPC1-7):G01J5/02;H01L21/306 主分类号 H01L21/302
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