发明名称 |
METHOD OF TEMPERATURE MEASUREMENT, METHOD OF TEMPERATURE CONTROL, AND DEVICE FOR HEAT TREATMENT |
摘要 |
PROBLEM TO BE SOLVED: To provide method of temperature measurement capable of measuring the temperature of a measuring body (body to be treated) with high accuracy in a multiple reflection environment. SOLUTION: In this method of measuring the temperature of the measuring body 54 (W) placed in the multiple reflection environment by using a radiation thermometer 40 utilizing emissivity, an effective emissivityεeff defineed by the following expression is used as the above emissivity:εeff=(1-α).ε+α.ε/[1.F.r.(1-ε)]. where F is a view factor,εis the emissivity of a measured value, r is the reflectivity of a reflector on the side of the radiation thermometer, andαis a weighting factor of multiple reflection. This enables the temperature of the measuring body (body to be treated) to be measured with high accuracy in the multiple reflection environment.
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申请公布号 |
JP2001208610(A) |
申请公布日期 |
2001.08.03 |
申请号 |
JP20000016341 |
申请日期 |
2000.01.25 |
申请人 |
TOKYO ELECTRON LTD |
发明人 |
SHIGEOKA TAKASHI;SAKUMA TAKESHI |
分类号 |
H01L21/302;G01J5/00;G01J5/02;H01L21/3065;H01L21/31;H01L21/66;(IPC1-7):G01J5/02;H01L21/306 |
主分类号 |
H01L21/302 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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