MEMBRANE PROBE CARD

摘要

PROBLEM TO BE SOLVED: To provide a module type membrane probe card reducing the cost and the maintenance time of a device and a membrane probe card for inspecting a high density integrated circuit having a matrix type layout. SOLUTION: The membrane probe card is disclosed. The membrane probe card includes a pressure mechanism 20 having an upper-housing 30 and a support block 34. The support block 34 has a spring system 32 for providing a distance of travel to the support block. A printed circuit board 38 is coupled to the pressure mechanism 20 for providing electrical connection to test apparatus. A membrane assembly 36 is coupled to the pads on a wafer for providing electrical connection to the printed circuit board 38. The membrane assembly 36 is a replaceable and modularized component for applying integrated circuits with various layouts and dimensions.