| 摘要 |
<p>PROBLEM TO BE SOLVED: To accurately inspect periodically repeating patterns on an object for their configuration. SOLUTION: Based on an original image with three or more gradations obtained by an image pickup device, an image shifting device 72 provides (N-1) shifted images which are formed when the original image is shifted by integer times of repeating cycles in the repeating direction of a specific pattern. A pattern formation information computing device 73 causes data points matching positions in an area where N images consisting of the original image and the (N-1) shifted images overlap one another to be positioned in an N-dimensional coordinate space while using a set of gradation values at the same position in each of the N images as data points in the N-dimensional coordinate space. Information about the patterns formed on the object is obtained with accuracy from the condition of the distribution of the data points in the N-dimensional coordinate space.</p> |
