| 摘要 |
PROBLEM TO BE SOLVED: To provide a shielding device with the high reduction effectiveness against a radiated noise. SOLUTION: This shielding device has a high frequency output device 1 outputting a high frequency and a high frequency-using unit 2 using the high frequency outputted from the high frequency output device 1, and is applied to a high frequency-using device which performs material processing or a cleaning of components by the high frequency-using unit 2. While the impedance- matching circuit 3 for matching the high frequency output impedance of the high frequency output device 1 to the impedance of the high frequency-using unit 2 is provided, the ground of the impedance-matching circuit 3 and the metal shielding box 4 covering the high frequency-using unit 2, are connected electrically. The voltage standing wave ratio of the high frequency feeder connected to the high frequency output device 1 can be made small. The noise current inducted to the shielding box 4 can be returned to the ground of the impedance-matching circuit 3.
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