| 发明名称 |
PELLET PICKUP EQUIPMENT AND PELLET-BONDING EQUIPMENT |
| 摘要 |
<p>PROBLEM TO BE SOLVED: To improve pickup efficiency in pellet pickup equipment used in pellet- bonding equipment. SOLUTION: In pellet pickup equipment 12, a pickup area setting device 30 is provided for setting in advance a pickup area A, in which a group of defective products of semiconductor pellets 3 is removed on a wafer 6.</p> |
| 申请公布号 |
JP2001210697(A) |
申请公布日期 |
2001.08.03 |
| 申请号 |
JP20000016242 |
申请日期 |
2000.01.25 |
| 申请人 |
SHIBAURA MECHATRONICS CORP |
发明人 |
KONO MICHITAKA |
| 分类号 |
H01L21/67;H01L21/52;H01L21/68;(IPC1-7):H01L21/68 |
主分类号 |
H01L21/67 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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