| 摘要 |
PROBLEM TO BE SOLVED: To obtain a piezoelectric multi-axial acceleration sensor which does not require the adjustment of the level fluctuations of X-, Y-, and Z-axis acceleration signals by means of a signal amplifier circuit. SOLUTION: The acceleration detecting electrode pattern E1 and counter electrode pattern E0 of this acceleration sensor are formed of conductive thin films formed by a thin film forming technique, such as the vapor deposition, sputtering, etc. Between the connecting lines L1-L5 and piezoelectric ceramic substrate 7a of the sensor, in addition, thin layers 27, 29, and 31 having low dielectric constants are formed by spin coating a resin. |
