| 摘要 |
PROBLEM TO BE SOLVED: To make a semiconductor device uniform in wiring data rate through its layout and to uniformly carry out etching or the like in manufacturing a semiconductor device. SOLUTION: A wiring data rate is checked (S2) after a normal wiring is laid (S1) so as to easily render a wiring data rate indicating the wiring density of a certain layout region uniform in the layout design of a semiconductor device. When it is found after an automatic layout/wiring is made that a region is low in wiring data rate (S3), dummy terminals are arranged on a power supply wiring or a ground wiring (S11 and S12), and a wiring connecting the dummy terminals together is additionally provided through an automatic layout system (S13 to S16), by which wirings can be set in a proper range of data rate. |
