INNER NEGATIVE ELECTRODE FOR GAS IMMOBILIZING DEVICE AND MANUFACTURING METHOD THEREFOR

摘要

PROBLEM TO BE SOLVED: To reduce a manufacturing cost of an inner negative electrode used as a spatter electrode for a gas immobilizing device using an ion implanting means and made of a material in which Y particles are uniformly dispersed in a Ni matrix and combined, by facilitating manufacturing of the composite material to save a manufacturing cost thereof. SOLUTION: Though spherical Y particles (0.5 to 1.0 mm in diameter) produced by plasma rotation electrode means are conventionally used as Y particles uniformly dispersed in an Ni matrix 14, polygonal Y particles (generally cube- shape with 4 to 6 sides) 15 obtained by mechanically cutting a rod-shaped cast article of Y are used in stead of the spherical Y particles. Therefore, a manufacturing cost of the Y particles becomes inexpensive, so that a material cost of an inner negative electrode 2 can be reduced, and sputtering performance as well as a conventional one can be obtained.