| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a method of manufacturing a photoelectric conversion device provided with a silver rear electrode having a high strength of adhesion against a rear transparent conductive layer. SOLUTION: This method includes steps of respectively forming a front transparent electrode, a thin film photoelectric conversion unit, and a rear transparent conductive layer on an insulating substrate. At the time of forming a light reflecting metallic layer, a first plasma area containing fine zinc oxide particles and a second plasma area containing fine silver particles are formed under a sputtering gas pressure of about 0.1-0.27 Pa in a reaction chamber and a zinc oxide-based adhesive layer and the silver-based light reflecting metallic layer are formed on the substrate by causing the substrate to pass over the first and second plasma areas formed in the reaction chamber. Thus the rear electrode having the rear transparent conducive layer, adhesive layer, and light reflecting metallic layer is formed.</p> |
