发明名称 GENERATING DEVICE FOR MULTIPLE LASER BEAMS
摘要 <p>PROBLEM TO BE SOLVED: To provide a laser beam generating device having multiple wavelength ranges. SOLUTION: This generating device for multiple laser beams includes a laser source 10 for outputting an initial beam F of P wavelengths and a wavelength-splitter 12 for dividing the initial beam into N intermediate beams FI, where N<=P is set. Each of the intermediate beams FI contains a wavelength group composed of at least one wavelength. The laser beam generating device includes N' energy splitter assemblies 14, 16, etc., for dividing the respective intermediate beams FI into ni division beams FD, where N'<=N is set. Each of the ni division beam has substantially the same energy. Thereby K division beams (FD) can be obtained according to equation.</p>
申请公布号 JP2001210904(A) 申请公布日期 2001.08.03
申请号 JP20000332778 申请日期 2000.10.31
申请人 AUTOMA TECH 发明人 CHARBONNIER SERGE;BOUREAU DAMIEN
分类号 G02B26/10;B23K26/067;G02B27/10;G02F1/11;G03F7/20;H01L21/027;H01S3/00;H01S3/10;H04N1/113;H05K3/00;(IPC1-7):H01S3/10 主分类号 G02B26/10
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